Substrate heater design for film deposition in oxidizing atmosphere

Pardo, F.; Burmeister, G.; Guimpel, J.
June 1996
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2370
Academic Journal
Describes a substrate heater for oxide film deposition. Main features; Good response of the system for the deposition conditions necessary in high temperature cuprate materials; Reliance of the design on radiative heat transfer coupling.


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