A closed loop controller for electron-beam evaporators

Band, Alan; Stroscio, Joseph A.
June 1996
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2366
Academic Journal
Describes an instrument for automatically controlling the deposition rate of an electron-beam evaporator. Incorporation of a commercially available, microprocessor based, process controller that provides loop control and automatic determination of optimal proportional, integral and differential loop constants; Linearization of the overall loop response.


Related Articles

  • Emittance meter for time-resolved electron-beam propagation studies. Schneider, R. F.; Smith, J. R.; Rhee, M. J. // Review of Scientific Instruments;Jan1988, Vol. 59 Issue 1, p186 

    A simple emittance meter is designed which is capable of measuring the temporal evolution of the emittance of a propagating electron beam. The design is based on that of a slit-pinhole emittance meter. A Cherenkov emitter is utilized as the electron detector. A streak camera is used to record...

  • Design study and experimental performance of a multistage electron collector. Roy, Prabir Kumar; Moon, Ahsa; Ohkubo, Kiochi; Nakao, Naoya; Mima, Kunioki; Fujita, Masayuki; Imasaki, Kazuo; Yamanaka, Chiyoe; Sano, Eisaku; Tsunawaki, Yoshiaki // Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4404 

    Presents a multistage electron collector designed for an electron-beam energy recovery system. Characteristics of the electrodes of the collector; Field effects of the electrodes; Energy recover efficiency; Provision of the potentials of each electrode.

  • Controlled production of warm electron beams. Doveil, F.; Tsunoda, S.I.; Malmberg, J.H. // Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2157 

    Reports on the production of warm beams by passing cold electron beams through a system of three closely spaced parallel grids. Immersion of the beam and grid structure in a magnetic field; Achievement of a controllable spread in both the transverse and axial energy distribution despite the...

  • Erratum: Plug-in fast electron beam chopping system [Rev. Sci. Instrum. 56, 567 (1985)]. Sadorf, H.; Kratz, H. A. // Review of Scientific Instruments;Nov85, Vol. 56 Issue 11, p2178 

    Presents a correction to a study on a plug-in fast electron beam chopping system published in a 1985 issue of the journal 'Review of Scientific Instruments.'

  • A segmented concentric Faraday cup for measurement of time-dependent relativistic electron beam profiles. Peyser, T. A.; Antoniades, J. A.; Myers, M. C.; Lampe, M.; Pechacek, R. E.; Murphy, D. P.; Meger, R. A. // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p2895 

    A multi-element segmented concentric Faraday collector has been developed for measuring the time evolution of the beam half-current radius (a[sub ½]) of an intense relativistic electron beam. Each collector segment measures the total current within its radius. The data analysis procedure fits...

  • Microwave electron gun theory and experiments. Gao, J. // Review of Scientific Instruments;Jan1992, Vol. 63 Issue 1, p64 

    A general microwave electron gun (rf gun) theory and some new ideas about further reducing the emittance of electron beams are reviewed and introduced briefly. Experimental results are presented from a thermionic cathode rf gun which has been developed for Beijing Free-Electron Laser Project...

  • An indirectly heated electron beam emitter assembly. Iqbal, Munawar; Chaudhary, Maqbool A.; Rafiq, M.; Masud, Khalid; Fazal-e-Aleem // Review of Scientific Instruments;Mar2003, Vol. 74 Issue 3, p1196 

    A simple, high performance indirectly heated axial electron gun has been designed and fabricated. A 0.9-mm-thick and 15-mm-wide tantalum strip was used as a cathode with an emission length of 42 mm. An emission current of 600 mA was achieved at an input heater power of only 116 W. The gun is...

  • System for velocity ratio measurements of an axis-rotating electron beam. Boulais, K. A.; Choe, J. Y.; Namkung, W.; Chun, S. T.; Choi, E. H. // Review of Scientific Instruments;Apr93, Vol. 64 Issue 4, p958 

    A novel system to measure the ratio of transverse velocity to axial velocity (α) of a low voltage, axis-rotating electron beam is described herein. With the system, more information about the beam can be obtained than from the usual slit/phosphor screen system. Since most of the beam is...

  • Erratum: A beam profile monitor for small electron beams [Rev. Sci. Instrum. 62, 1464 (1991)]. Norem, J. // Review of Scientific Instruments;Mar92, Vol. 63 Issue 3, p2105 

    Presents a corrected version of an error in the article 'A beam profile monitor for small electron beams.' Interchanging of figures 3 and 4.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics