TITLE

A closed loop controller for electron-beam evaporators

AUTHOR(S)
Band, Alan; Stroscio, Joseph A.
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2366
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes an instrument for automatically controlling the deposition rate of an electron-beam evaporator. Incorporation of a commercially available, microprocessor based, process controller that provides loop control and automatic determination of optimal proportional, integral and differential loop constants; Linearization of the overall loop response.
ACCESSION #
4295451

 

Related Articles

  • Emittance meter for time-resolved electron-beam propagation studies. Schneider, R. F.; Smith, J. R.; Rhee, M. J. // Review of Scientific Instruments;Jan1988, Vol. 59 Issue 1, p186 

    A simple emittance meter is designed which is capable of measuring the temporal evolution of the emittance of a propagating electron beam. The design is based on that of a slit-pinhole emittance meter. A Cherenkov emitter is utilized as the electron detector. A streak camera is used to record...

  • Design study and experimental performance of a multistage electron collector. Roy, Prabir Kumar; Moon, Ahsa; Ohkubo, Kiochi; Nakao, Naoya; Mima, Kunioki; Fujita, Masayuki; Imasaki, Kazuo; Yamanaka, Chiyoe; Sano, Eisaku; Tsunawaki, Yoshiaki // Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4404 

    Presents a multistage electron collector designed for an electron-beam energy recovery system. Characteristics of the electrodes of the collector; Field effects of the electrodes; Energy recover efficiency; Provision of the potentials of each electrode.

  • Controlled production of warm electron beams. Doveil, F.; Tsunoda, S.I.; Malmberg, J.H. // Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2157 

    Reports on the production of warm beams by passing cold electron beams through a system of three closely spaced parallel grids. Immersion of the beam and grid structure in a magnetic field; Achievement of a controllable spread in both the transverse and axial energy distribution despite the...

  • Erratum: Plug-in fast electron beam chopping system [Rev. Sci. Instrum. 56, 567 (1985)]. Sadorf, H.; Kratz, H. A. // Review of Scientific Instruments;Nov85, Vol. 56 Issue 11, p2178 

    Presents a correction to a study on a plug-in fast electron beam chopping system published in a 1985 issue of the journal 'Review of Scientific Instruments.'

  • A segmented concentric Faraday cup for measurement of time-dependent relativistic electron beam profiles. Peyser, T. A.; Antoniades, J. A.; Myers, M. C.; Lampe, M.; Pechacek, R. E.; Murphy, D. P.; Meger, R. A. // Review of Scientific Instruments;Dec1991, Vol. 62 Issue 12, p2895 

    A multi-element segmented concentric Faraday collector has been developed for measuring the time evolution of the beam half-current radius (a[sub ½]) of an intense relativistic electron beam. Each collector segment measures the total current within its radius. The data analysis procedure fits...

  • Microwave electron gun theory and experiments. Gao, J. // Review of Scientific Instruments;Jan1992, Vol. 63 Issue 1, p64 

    A general microwave electron gun (rf gun) theory and some new ideas about further reducing the emittance of electron beams are reviewed and introduced briefly. Experimental results are presented from a thermionic cathode rf gun which has been developed for Beijing Free-Electron Laser Project...

  • An indirectly heated electron beam emitter assembly. Iqbal, Munawar; Chaudhary, Maqbool A.; Rafiq, M.; Masud, Khalid; Fazal-e-Aleem // Review of Scientific Instruments;Mar2003, Vol. 74 Issue 3, p1196 

    A simple, high performance indirectly heated axial electron gun has been designed and fabricated. A 0.9-mm-thick and 15-mm-wide tantalum strip was used as a cathode with an emission length of 42 mm. An emission current of 600 mA was achieved at an input heater power of only 116 W. The gun is...

  • System for velocity ratio measurements of an axis-rotating electron beam. Boulais, K. A.; Choe, J. Y.; Namkung, W.; Chun, S. T.; Choi, E. H. // Review of Scientific Instruments;Apr93, Vol. 64 Issue 4, p958 

    A novel system to measure the ratio of transverse velocity to axial velocity (α) of a low voltage, axis-rotating electron beam is described herein. With the system, more information about the beam can be obtained than from the usual slit/phosphor screen system. Since most of the beam is...

  • Erratum: A beam profile monitor for small electron beams [Rev. Sci. Instrum. 62, 1464 (1991)]. Norem, J. // Review of Scientific Instruments;Mar92, Vol. 63 Issue 3, p2105 

    Presents a corrected version of an error in the article 'A beam profile monitor for small electron beams.' Interchanging of figures 3 and 4.

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics