TITLE

Focused ion-beam direct deposition of metal thin film

AUTHOR(S)
Nagamachi, Shinji; Yamakage, Yasuhiro; Ueda, Masahiro; Maruno, Hiromasa; Ishikawa, Junzo
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2351
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the development of focused ion-beam direct deposition as a method for fabricating patterned metal films directly on substrates. Performance of ion-beam deposition by low-energy focused ion beams; Estimated beam diameter; Measurement of the purity of the gold film using Auger electron spectroscopy and secondary-ion mass spectroscopy.
ACCESSION #
4295449

 

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