TITLE

Cleanroom compatible anodization cell for 150 mm Si wafers

AUTHOR(S)
Bardwell, Jennifer A.; LeBrun, Les; Evans, R. James; Curry, Donald G.
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2346
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the construction and testing of a cleanroom compatible anodization cell for use in silicon wafers. Material of construction; Elimination of the possibility for metallic contamination; Use of platinum electrodes immersed in the back contact and front contact solutions as primary electrical connection sites.
ACCESSION #
4295448

 

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