TITLE

A calibrated scanning tunneling microscope equipped with capacitive sensors

AUTHOR(S)
Holman, A.E.; Laman, C.D.; Scholte, P.M.L.O.; Heerens, W.Chr.; Tuinstra, F.
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2274
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a two dimensional calibrated scanning stage that dynamically measures the actual X-Y position of the tip using capacitive sensors. Geometric deformations in the scanning probe microscope images by piezoelectric effects like hysteresis, nonlinearity and drift; Method for correcting piezoelectric voltages.
ACCESSION #
4295436

 

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