TITLE

Combined ultrahigh vacuum scanning tunneling microscope scanning electron microscope system

AUTHOR(S)
Memmert, U.; Hodel, U.; Hartmann, U.
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2269
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes a combined ultrahigh vacuum scanning microscope (STM)-scanning electron microscope (SEM) system. Feature of atomic resolution on semiconductor surfaces by the STM; Atomic resolution imaging of silicon surfaces to check STM performance; Potential of the system for high-resolution imaging in materials research.
ACCESSION #
4295435

 

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