TITLE

A compact mass spectrometer for plasma discharge ion analysis

AUTHOR(S)
Tuszewski, M.
PUB. DATE
June 1996
SOURCE
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2215
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports on the successful operation of a simple, compact and inexpensive mass spectrometer for ion species analysis in plasma processing experiments. Introduction of the instrument in most plasma discharges for in situ rather than for edge studies; Moderate resolution of the mass spectrometer.
ACCESSION #
4295428

 

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