Sputtering-assisted production of multicharged boron ions from solid material in a 2.45 GHz

Kato, Yushi; Ishii, Shigeyuki
June 1996
Review of Scientific Instruments;Jun96, Vol. 67 Issue 6, p2171
Academic Journal
Reports on the production of multiply charged boron ions and extraction from 2.45 GHz electron cyclotron resonance (ECR) ion source without gaseous feedstocks. Selection of argon as operating gas; Increase in the extracted boron ion current as target nears the ECR zone; Total boron ion current.


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