TITLE

Optimization of the surface morphology of magnetron-sputtered

AUTHOR(S)
Auge, Jurgen; Jansen, Margit; Roskos, Hartmut G.; Kurz, Heinrich
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/6/1994, Vol. 64 Issue 23, p3166
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the optimization of surface morphology of magnetron sputtered Y[sub 1]Ba[sub 2]Cu[sub 3]O[sub 7] films by plasma current control. Performance of optimization at different substrate temperature; Maximization of transition temperature and homogeneity of the films; Retention of high characteristic transition temperature.
ACCESSION #
4294487

 

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