TITLE

Lateral structuring of silicon thin films by interference crystallization

AUTHOR(S)
Heintze, M.; Santos, P.V.; Nebel, C.E.; Stutzman, M.
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/6/1994, Vol. 64 Issue 23, p3148
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the lateral structuring of silicon thin films by transient holography using high-energy pulse laser. Induction of crystallization by the energy density along the lines of the transient optical grid; Production of laterally structured microcrystalline silicon; Application of selective etching.
ACCESSION #
4294471

 

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