TITLE

Observation of voids induced by mechanical stress and electromigration in passivated Al lines

AUTHOR(S)
Marieb, T.; Bravman, J.C.; Flinn, P.; Gardner, D.S.; Madden, M.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/2/1994, Vol. 64 Issue 18, p2424
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the void formation in passivated aluminum (Al) lines induced by mechanical stress and electromigration. Electromigration resistance of Al line samples prepared at different purity levels; Temperature during the electromigration testing; Occurrence of void nucleation at the passivation-metal interface.
ACCESSION #
4294367

 

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