New interface structure for A-type CoSi[sub 2]/Si(111)

Chisholm, M.F.; Pennycook, S.J.; Jebasinski, R.; Mantl, S.
May 1994
Applied Physics Letters;5/2/1994, Vol. 64 Issue 18, p2409
Academic Journal
Presents a model of CoSi[sub 2]/Si(111) interface structure produced by Z-contrast scanning transmission electron microscopy. Implantation of cobalt ions in silicon substrates; Presence of coordinated cobalt atoms at the interface structure; Atomic structure of the buried CoSi[sub 2] layer.


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