TITLE

Autocorrelation function analysis of phase formation in the initial stage of interfacial

AUTHOR(S)
Liang, J.M.; Chen, L.J.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/7/1994, Vol. 64 Issue 10, p1224
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the autocorrelation function analysis of amorphous interlayers formed in the interfacial reactions of molybdenum (Mo) thin films on (111)silicon (Si). Use of transmission electron microscopy; Correlation between Mo[sub 3]Si and Mo-Si alloy; Identification of Mo[sub 3]Si as the first nucleated crystalline phase.
ACCESSION #
4294242

 

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