Thermal stability of titanium hydride thin films

Chatbi, H.; Vergnat, M.; Marchal, G.
March 1994
Applied Physics Letters;3/7/1994, Vol. 64 Issue 10, p1210
Academic Journal
Investigates the thermal stability of titanium hydride thin films by reactive evaporation. Use of the effusion method to monitor the release of hydrogen; Representation of two peaks in the gas evolution spectrum; Analysis of titanium hydride films in terms of the three potential rate-limiting steps.


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