Nanometer-scale lithography on Si surface by decomposition of ferrocene molecules using a

Thibaudau, F.; Roche, J.R.; Salvan, F.
January 1994
Applied Physics Letters;1/24/1994, Vol. 64 Issue 4, p523
Academic Journal
Demonstrates nanoscale writing by field ionization decomposition of organometallic molecules during scanning tunneling microscopy tip on a silicon surface. Description of lithography experiments on boron doped silicon substrates; Dependence of probability of the tip to molecule distance; Edge sharpness of the pattern.


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