Density of amorphous Si

Custer, J.S.; Thompson, Michael O.; Jacobson, D.C.; Poate, J.M.; Roorda, S.; Sinke, W.C.; Spaepen, F.
January 1994
Applied Physics Letters;1/24/1994, Vol. 64 Issue 4, p437
Academic Journal
Examines the measurements of the density of self-implanted amorphous silicides layers over a wide range of thickness, growth, and relaxation condition. Production of alternating amorphous/crystalline silicon stripes; Observation of plastic deformation of the surrounding crystal matrix; Height differences between the amorphous and crystalline regions.


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