TITLE

Application of x-ray interference method for residual strain measurement in low energy Ar

AUTHOR(S)
Cho-Jen Tsai; Vreeland Jr., Thad; Atwater, Harry A.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/24/1994, Vol. 64 Issue 4, p434
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the employment of x-ray interference technique to quantify the average residual strain generated by low energy ion bombardment. Determination of average residual strain in thin bombarded layers; Increase of the interference peak; Formation of defects by low energy ion bombardment at moderate temperature.
ACCESSION #
4294166

 

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