TITLE

Pyrolytic laser assisted chemical vapor deposition of Al from dimethylethylamine-alane:

AUTHOR(S)
Jaesung Han; Jensen, Klavs F.; Senzaki, Yoshihide; Gladfelter, Wayne L.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/24/1994, Vol. 64 Issue 4, p425
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates pyrolytic laser assisted chemical vapor deposition of aluminum from dimethylethylamine-alane with 514-nanometer radiation from an argon ion laser. Existence of high purity aluminum (Al) lines; Delineation of operating parameters and material property relation; Demonstration of a two-step fast writing process.
ACCESSION #
4294163

 

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