TITLE

1 000 000 degrees C/s thin film electrical heater: In situ resistivity measurements of Al and

AUTHOR(S)
Allen, L.H.; Ramanath, G.; Lai, S.L.; Ma, Z.; Lee, S.; Allman, D.D.J.; Fuchs, K.P.
PUB. DATE
January 1994
SOURCE
Applied Physics Letters;1/24/1994, Vol. 64 Issue 4, p417
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates a method for annealing thin film using an electrical thermal annealing pulse technique. Application of high-current direct current electrical pulse to a conductive substrate heater material; Demonstration of aluminum thin films heating; Observation of a phase transformation in the titanate-silicon system.
ACCESSION #
4294160

 

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