Demonstration of Y[sub 1]Ba[sub 2]Cu[sub 3]O[sub 7-delta] and complementary

Burns, M.J.; de la Houssaye, P.R.; Russell, S.D.; Garcia, G.A.; Clayton, S.R.; Ruby, W.S.; Lee, L.P.
August 1993
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1282
Academic Journal
Fabricates active semiconductor and high-temperature superconducting devices on the same substrate. Use of biepitaxial and step-edge Josephson junctions; Operation of the semiconductor and superconductor devices at 77 K; Role of the cofabrication process in the fabrication of true semi/superconducting hybrid integrated circuits.


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