Large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorus and

Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P.
August 1993
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1249
Academic Journal
Investigates the large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorus and aluminum. Measurement of the diffusion length; Application process of diffusion; Achievement of bulk diffusion length improvement in both float zone and Czochralski silicon material.


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