TITLE

Large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorus and

AUTHOR(S)
Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1249
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the large diffusion length enhancement in silicon by rapid thermal codiffusion of phosphorus and aluminum. Measurement of the diffusion length; Application process of diffusion; Achievement of bulk diffusion length improvement in both float zone and Czochralski silicon material.
ACCESSION #
4294136

 

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