TITLE

Effect of ultraviolet irradiation upon the recombination lifetime of silicon wafers covered with

AUTHOR(S)
Zhong, L.; Ando, K.; Tsuya, H.; Shimura, F.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1246
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of ultraviolet (UV) irradiation upon the recombination lifetime of silicon wafers covered with a dielectric film. Distinction of lifetime changes from first UV irradiation to thermal annealing at 500 kelvin; Comparison between UV irradiation effect and silicon wafers with different dielectric films.
ACCESSION #
4294135

 

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