TITLE

Evolution of monolayer terrace topography during metalorganic chemical vapor deposition of (100)

AUTHOR(S)
Epler, J.E.; Schweizer, H.P.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1228
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the development of monolayer terrace topography in metalorganic chemical vapor deposition of (100) GaAs. Materials used in observing the evolution of monolayer terrace topography; Process of determining the temporal and orientation dependence of diffuse optical scattering; Discussions on the influence of substrate miscut and growth temperature rate.
ACCESSION #
4294129

 

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