TITLE

Observations on interfacial segregation and precipitation of arsenic-doped polycrystalline

AUTHOR(S)
Chih-Hang Tung; Kay-Yuan Lee; Ray-Chern Deng; Lurng-Sheng Lee
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/30/1993, Vol. 63 Issue 9, p1197
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the interfacial segregation and precipitation of arsenic doped polycrystalline silicon (100) substrate. Purpose in observing the native silicon dioxide thin film; Influence of arsenic on the interfacial evolution; Agglomeration of native silicon dioxide thin film into discrete oxide particles.
ACCESSION #
4294117

 

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