TITLE

Potential structure in silane radio-frequency discharge containing particles

AUTHOR(S)
Okuno, Yoshihiro; Fujita, Hiroharu; Shiratani, Masaharu; Watanabe, Yukio
PUB. DATE
September 1993
SOURCE
Applied Physics Letters;9/27/1993, Vol. 63 Issue 13, p1748
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports the potential structure in silane radio-frequency discharge containing particles. Shift of the crest and trough instantaneous plasma potentials toward the negative side; Reduction in the absolute value of the self-bias potential of the powered electrode; Existence of an electric field in the bulk plasma.
ACCESSION #
4294065

 

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