Thermal stability of strained In[sub x]Ga[sub 1-x]As/In[sub y]Al[sub 1-y]As/InP heterostructures

Bennett, Brian R.; del Alamo, Jesus A.
August 1993
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1122
Academic Journal
Examines the thermal stability of indium (In)-gallium-arsenic (As) and In-aluminum-As on In-phosphorus strained layers. Analysis on epilayer and interface quality as a function of annealing cycle; Use of high-resolution x-ray diffraction and electron mobility measurements; High crystalline quality retention of pseudomorphic heterostructures.


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