Scanning tunneling microscopy investigations of the Si(111) topography produced by etching in

Hsiao, Gregor S.; Virtanen, Jorma A.; Penner, Reginald M.
August 1993
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1119
Academic Journal
Investigates the time evolution of the topography of an oxidized silicon (Si) surface immersed in an aqueous 40% NH[sub 4]F etching solution. Use of scanning tunneling microscopy; Production of Si pillars at shielded surface locations; Suppression of gas evolution and roughening by reductant addition.


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