TITLE

Scanning tunneling microscopy investigations of the Si(111) topography produced by etching in

AUTHOR(S)
Hsiao, Gregor S.; Virtanen, Jorma A.; Penner, Reginald M.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1119
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the time evolution of the topography of an oxidized silicon (Si) surface immersed in an aqueous 40% NH[sub 4]F etching solution. Use of scanning tunneling microscopy; Production of Si pillars at shielded surface locations; Suppression of gas evolution and roughening by reductant addition.
ACCESSION #
4294040

 

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