TITLE

Low-temperature synthesis of BaTiO[sub 3] thin films on silicon substrates by hydrothermal reaction

AUTHOR(S)
Bacsa, R.R.; Dougherty, J.P.; Pilione, L.J.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1053
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the low-temperature synthesis of barium titanate thin films on silicon (Si) substrates by hydrothermal reaction. Reaction between the Si substrate and the titanium (Ti) film; Prevention of Si diffusion through the Ti layer; Effect of the reaction between titanium carbide and the Ti layer on film adherence.
ACCESSION #
4294016

 

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