TITLE

Measurement of residual stress in MgO thin films on GaAs by electron microscopy

AUTHOR(S)
De Graef, Marc; Clarke, David R.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1044
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Determines the residual stress in magnesium oxide thin films on gallium arsenide by electron microscopy. Indication of an additional stress through the compressive nature of the film stress; Effect of the nonequilibrium of the film on the stress; Description of the elastic buckling of a stressed thin film.
ACCESSION #
4294013

 

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