TITLE

Electrical properties of strontium titanate thin films by multi-ion-beam reactive sputtering

AUTHOR(S)
Peng, C.-J.; Hu, H.; Krupanidhi, S.B.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/23/1993, Vol. 63 Issue 8, p1038
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Describes the electrical properties of strontium titanate thin films by multi-ion-beam reactive sputtering technique. Dependence of the dielectric behavior on the thickness of the films; Influence of the interface layers between the film and silicon substrate on the electrical behavior; Effect of the Poole-Frenkel emission mechanisms on film conduction.
ACCESSION #
4294011

 

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