High activation efficiency in Mg[sup +] implanted GaAs by P[sup +] coimplantation

Honglie Shen; Zuyao Zhou; Honglai Xu; Guanqun Xia; Shichang Zou
October 1992
Applied Physics Letters;10/26/1992, Vol. 61 Issue 17, p2093
Academic Journal
Examines the high activation efficiency in magnesium ion implanted gallium arsenide by phosphorous ion coimplantation. Variation of activation efficiency and mobility with annealing temperature; Attainment of the highest dopant activation; Reduction in the implanted magnesium redistribution.


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