Nuclear magnetic resonance study on Si-H microstructure in hydrogenated amorphous silicon

Kuo-Chiang Hsu; Huey-Liang Hwang
October 1992
Applied Physics Letters;10/26/1992, Vol. 61 Issue 17, p2075
Academic Journal
Examines silicon-hydrogen (Si-H) microstructures in hydrogenated amorphous silicon films by nuclear magnetic resonance measurements. Exhibition of the nuclear magnetic resonance sharp line shape; Configuration of the isolated Si-H bonding structures; Determination of the hydrogen content of the amorphous silicon samples.


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