Visible photoluminescence in crystallized amorphous Si:H/SiN[sub x]:H multiquantum-well structures

Kunji Chen; Xinfan Huang; Jun Xu; Duan Feng
October 1992
Applied Physics Letters;10/26/1992, Vol. 61 Issue 17, p2069
Academic Journal
Examines the visible photoluminescence in crystallized amorphous Si:H/SiN[sub x]:H multiquantum-well structures. Formation of the multiquantum-well heterostructures by plasma-enhanced chemical-vapor deposition; Determination of the silicon microcrystal crystallinity and grain size; Mechanism of layer structure laser crystallization.


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