TITLE

Apparent super resolution in high-contrast photoresists

AUTHOR(S)
Peckerar, Martin; Rebbert, Milton; Gopalakrishnan, Ganesh
PUB. DATE
October 1992
SOURCE
Applied Physics Letters;10/26/1992, Vol. 61 Issue 17, p2036
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines super resolution in high-contrast photoresists. Generation of metal thickness through electroplating using resist guides; Relation of boundary spreading with resist thickness; Importance of light scattering in determining the spread of Gaussian pulses; Maintenance of the steep sidewall slope.
ACCESSION #
4293973

 

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