Characterization of photoluminescent porous Si by small-angle scattering of x rays

Vezin, V.; Goudeau, P.; Naudon, A.; Halimaoui, A.; Bomchil, G.
May 1992
Applied Physics Letters;5/25/1992, Vol. 60 Issue 21, p2625
Academic Journal
Demonstrates a microstructural study of high-porosity porous silicon layers formed on lightly p-doped wafers by x-ray small-angle scattering. Continuous modification in the shape of the scattering profiles; Decrease in the silicon skeleton mass fractal dimension; Characteristics of an isotropic three-dimensional structure.


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