Coalescence of nanosized copper colloid particles formed in Cu-implanted SiO[sub 2] glass by

Hosono, Hideo; Abe, Yoshihiro; Matsunami, Noriaki
May 1992
Applied Physics Letters;5/25/1992, Vol. 60 Issue 21, p2613
Academic Journal
Examines the formation of nanosized metallic colloid particles with spherical shape using fluorine ions implanted silicon dioxide glass substrates. Shift of the peak position of a band; Distinction of the bimodal distribution of depth copper concentration; Distribution of the copper colloid particles; Role of cascade regions on the coalescence.


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