Surface-selective x-ray topographic observations of mechanochemical polished silicon surfaces

Kimura, Shigeru; Mizuki, Jun'ichiro; Matsui, Junjie; Ishikawa, Tetsuya
May 1992
Applied Physics Letters;5/25/1992, Vol. 60 Issue 21, p2604
Academic Journal
Demonstrates the surface-selective topographic observation using asymmetric diffraction. Tunability of synchrotron radiation; Visualization of the surface strains of mechanochemical polished silicon(001) and silicon wafers; Characterization of the surface damage of polished silicon wafers.


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