TITLE

Surface-selective x-ray topographic observations of mechanochemical polished silicon surfaces

AUTHOR(S)
Kimura, Shigeru; Mizuki, Jun'ichiro; Matsui, Junjie; Ishikawa, Tetsuya
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/25/1992, Vol. 60 Issue 21, p2604
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Demonstrates the surface-selective topographic observation using asymmetric diffraction. Tunability of synchrotron radiation; Visualization of the surface strains of mechanochemical polished silicon(001) and silicon wafers; Characterization of the surface damage of polished silicon wafers.
ACCESSION #
4293924

 

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