TITLE

Effects of deposition parameters on the refractive index in plasma polymerized methyl

AUTHOR(S)
Tobin, J.A.; Denton, D.D.
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/25/1992, Vol. 60 Issue 21, p2595
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the plasma polymerization of methyl methacrylate for use in microelectronic and photonic application. Effects of varying radio frequency power and neutral pressure on deposition rate and refractive index; Measurement of the index of refraction and thickness of the films.
ACCESSION #
4293920

 

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