TITLE

Novel platinum-tin oxide-silicon nitride-silicon dioxide-silicon gas sensing component for

PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/19/1993, Vol. 63 Issue 3, p421
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops a gas sensing component based on a platinum-tin oxide-silicon nitride-silicon dioxide-silicon metal-insulator-semiconductor capacitor. Integration of the catalytic properties of platinum and the gas sensing properties of tin oxide; Capability of the device to detect oxygen and carbon monoxide gases at room temperature; Responses of the flat-band voltage.
ACCESSION #
4292178

 

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