TITLE

High-resolution electron microscopic study of the interface between diamond film and its substrate

PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/19/1993, Vol. 63 Issue 3, p328
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Observes the high-resolution electron microscopic study of the interface structure between diamond film and silicon substrate. Importance of diamond for electronic and wear-resistant coating applications; Synthesis of diamond film by chemical vapor deposition process; Enhancement of the nucleation density in diamond deposition.
ACCESSION #
4292147

 

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