Emission spectroscopy during direct-current-biased, microwave-plasma chemical vapor deposition
Related Articles
- Modeling of Moderate Pressure Microwave Plasmas Used for Diamond Deposition: Collisional Data Required for Process Simulation. Hassouni, K.; Gicquel, A. // AIP Conference Proceedings;2002, Vol. 636 Issue 1, p61
Different aspects of the modeling of moderate pressure hydrogen and hydrogen methane plasma obtained under conditions relevant to diamond thin films deposition are discussed. First, a collisional-radiative model (CRM) of H[sub 2] plasmas is presented and used in the frame of a quasi-homogenous...
- Adhesion of polycrystalline diamond thin films on single-crystal silicon substrates. Gamlen, C.A.; Case, E.D.; Reinhard, D.K.; Huang, B. // Applied Physics Letters;11/11/1991, Vol. 59 Issue 20, p2529
Investigates the adhesion of polycrystalline diamond thin films on single-crystal silicon substrates. Use of microwave plasma disk reactor; Production of circular delaminations between the film and substrate; Correlation between delamination diameter and square root of the coating grain size.
- Nanoindentation hardness and adhesion investigations of vapor deposited nanostructured diamond films. Catledge, Shane A.; Borham, James; Vohra, Yogesh K.; Lacefield, William R.; Lemons, Jack E. // Journal of Applied Physics;4/15/2002, Vol. 91 Issue 8, p5347
The effect of changing the N[sub 2]/CH[sub 4] feedgas ratio on the structure and mechanical properties of microwave plasma chemical vapor deposited diamond films grown on Ti–6Al–4V alloy substrates was investigated. The relative concentration of CH[sub 4] and N[sub 2] (in a balance...
- Band-A emission in synthetic diamond films: A systemic investigation. Marinelli, Marco; Hatta, A. // Applied Physics Letters;3/18/1996, Vol. 68 Issue 12, p1631
Examines the band-A emission in synthetic diamond films. Role of cathodoluminescence spectroscopy in the study of diamond defects; Extraction of film morphologies, preferential orientations and crystal qualities; Characterization of the films by x-ray diffraction, Raman spectroscopy and...
- Fullerenes as precursors for diamond film growth film growth without hydrogen or oxygen additions. Gruen, Dieter M.; Shengzhong Liu // Applied Physics Letters;3/21/1994, Vol. 64 Issue 12, p1502
Examines the growth of diamond films on a fullerene precursor in an argon microwave plasma. Significance of hydrogen in diamond thin-film growth process; Cause of structural defects in diamond lattice; Growth rate of the fine-grained diamond films; Characteristics of the arsenide-deposited films.
- Characterization of diamond films synthesized in the microwave plasmas of CO/H2 and CO/O2/H2 systems at low temperatures (403–1023 K). Muranaka, Yasushi; Yamashita, Hisao; Miyadera, Hiroshi // Journal of Applied Physics;6/15/1991, Vol. 69 Issue 12, p8145
Describes a study which characterized the diamond films synthesized in the microwave plasmas of CO/H[sub2] and CO/O[sub2]/H[sub2] systems at low temperatures. Industrial application of diamond films; Crystallinity of the film; Growth rates of the film; Measurement of cathodoluminescence spectra.
- STABILIZATION OF MICROWAVE ARC PLASMAS OF HYDROCARBONS AT ATMOSPHERIC PRESSURE. Simon, Mark W.; Rozak, Jeffrey R.; Suib, Steven L.; Harrison, Jeffrey; Kablauoi, Mahmoud // Research on Chemical Intermediates;2000, Vol. 26 Issue 6, p529
Discusses a study which described the important relationship between a microwave discharge and its corresponding emission spectrum and illustrated its usefulness on in situ technique. Experimental framework of the study; Results; Discussion; Conclusions.
- Microstructural study of the alternating current bias-enhanced nucleation and growth of diamond.... Tae-Yeon Seong; Do-Geun Kim // Applied Physics Letters;6/23/1997, Vol. 70 Issue 25, p3368
Examines the bias-enhanced nucleation (BEN) and growth of diamond films by microwave plasma chemical vapor deposition. Use of transmission electron microscopy, transmission electron diffraction, atomic force microscopy and scanning electron microscopy; Epitaxial relations between silicon...
- Nitrogen stabilized <100> texture in chemical vapor deposited diamond films. Locher, R.; Wild, C. // Applied Physics Letters;7/4/1994, Vol. 65 Issue 1, p34
Examines the influence of nitrogen impurities in CH[sub 4]/h[sub 2] gas mixtures on the structure and morphology of polycrystalline diamond films prepared by microwave plasma assisted chemical vapor deposition. Usage of optical emission spectroscopy to detect nitrogen in the plasma; Possibility...
