Emission spectroscopy during direct-current-biased, microwave-plasma chemical vapor deposition

July 1993
Applied Physics Letters;7/19/1993, Vol. 63 Issue 3, p314
Academic Journal
Investigates direct current biasing during diamond film synthesis in a microwave plasma using optical emission spectroscopy. Intensities of the hydrogen Balmer alpha and beta lines; Estimation of the relative concentrations of neutral atomic hydrogen; Use of an argon emission line as an actinometer.


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