Transmission electron microscopy study of the nitridation of the (0001) sapphire surface

Vannegues, P.; Beaumont, B.
December 1999
Applied Physics Letters;12/27/1999, Vol. 75 Issue 26, p4115
Academic Journal
Studies the nitridation of the (0001) sapphire surface which is key step for the fabrication of high-quality gallium nitride (GaN) materials. Formation of a fully crystalline 10-atomic-planes-thick aluminum nitride film; Chemical transformation of the aluminum oxide surface.


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