Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

Eng, K.; Strohmaier, K.; Palmer, R.; Stoner, B.; Washburn, S.
June 1997
Review of Scientific Instruments;Jun97, Vol. 68 Issue 6, p2381
Academic Journal
Reports that radio frequency antennae, coated with glass, were inductively coupled to an Ar plasma inside the processing chamber. Coupling efficiency and electron density for moderate pressures; Instabilities and hysteresis observed for the internal antennae.


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