TITLE

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

AUTHOR(S)
Eng, K.; Strohmaier, K.; Palmer, R.; Stoner, B.; Washburn, S.
PUB. DATE
June 1997
SOURCE
Review of Scientific Instruments;Jun97, Vol. 68 Issue 6, p2381
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Reports that radio frequency antennae, coated with glass, were inductively coupled to an Ar plasma inside the processing chamber. Coupling efficiency and electron density for moderate pressures; Instabilities and hysteresis observed for the internal antennae.
ACCESSION #
4290487

 

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