TITLE

Force-balancing microforce sensor with an optical-fiber interferometer

AUTHOR(S)
Kato, Nobuhiro; Suzuki, Ippei; Kikuta, Hisao; Iwata, Koichi
PUB. DATE
June 1997
SOURCE
Review of Scientific Instruments;Jun97, Vol. 68 Issue 6, p2475
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a microforce sensor with a force feedback method for scanning force microscopy. Construction of the force sensor using an optical fiber and a microcantilever; Coating of the facet of the optical fiber with a gold thin film; Interaction force between a probe tip and a sample.
ACCESSION #
4290476

 

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