A three gun sputtering system for the deposition of superconductor/insulator multilayers

Maglic, S.R.; Rippert, E.D.; Yang, H.Q.; Thomas, C.D.; Song, S.N.; Ulmer, M.P.; Ketterson, J.B.
May 1997
Review of Scientific Instruments;May97, Vol. 68 Issue 5, p2127
Academic Journal
Describes a sputtering deposition system developed to grow high-quality superconductor/insulator multilayers specifically for use in fabricating vertically stacked Josephson junctions. Computer control of all parameters involved in the repetitive deposition of multilayers; Film characterization; Junction fabrication and characterization.


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