TITLE

Differential isothermal capacitance transient spectroscopy for the studies of deep levels in

AUTHOR(S)
Suno, K.; Toshino, J.; Okamoto, Y.; Morimoto, J.; Miyakawa, T.
PUB. DATE
May 1997
SOURCE
Review of Scientific Instruments;May97, Vol. 68 Issue 5, p2116
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Proposes differential isothermal capacitance transient spectroscopy and normalized isothermal capacitance transient spectroscopy to improve the resolution of the conventional isothermal capacitance transient spectroscopy which could characterize the deep levels in semiconductors isothermally. Study on the resolution of the methods; Error ratio of the estimation.
ACCESSION #
4290441

 

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