Perturbation theoretical analysis and its application for TM[sub 010]-mode microwave cavity of a

Xu Guochang; Liu Jun
May 1997
Review of Scientific Instruments;May97, Vol. 68 Issue 5, p1935
Academic Journal
Discusses the derivation of an analytical expression and a perturbation formula for the cavity resonant frequency dependence of the plasma for cylindrical TM[sub 010]-microwave plasma cavity. Accurate use of the perturbation theory in analyzing the perturbation effect; Resonant frequency shift caused by microwave plasma; Prevention of cavity detuning.


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