Drift elimination in the calibration of scanning probe microscopes

Staub, R.; Alliata, D.; Nicolini, C.
March 1995
Review of Scientific Instruments;Mar95, Vol. 66 Issue 3, p2513
Academic Journal
Proposes a method of calibrating the scanning probe microscope (SPM) eliminating the effects of drift in a first-order approximation. Use of the method in calculating the piezo sensitivity from SPM images; Success in calibrating a commercial SPM system for atomic resolution scans with a precision better than two percent.


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