TITLE

Germanium- and silicon-doped indium-oxide thin films prepared by radio-frequency magnetron

AUTHOR(S)
Maruyama, Toshiro; Tago, Teruoki
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/14/1994, Vol. 64 Issue 11, p1395
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the preparation of germanium- and silicon-doped indium-oxide thin films by radio-frequency magnetron sputtering method. Carrier concentrations and Hall mobilities of the materials; Dependence of film resistivity on atomic ratio; Measurement of film composition by x-ray photoelectron spectroscopy.
ACCESSION #
4289590

 

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