In situ acoustic temperature tomography of semiconductor wafers

Degertekin, F. Levent; Jun Pei; Khuri-Yakub, Butrus T.; Saraswat, Krishna C.
March 1994
Applied Physics Letters;3/14/1994, Vol. 64 Issue 11, p1338
Academic Journal
Examines the spatial temperature distribution in semiconductor wafers during rapid thermal processing. Use of acoustic tomography; Application of electronic switching information of the transmitter and receiver transducer; Calculation of the temperature distribution from different pixel map measurements.


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