TITLE

In situ acoustic temperature tomography of semiconductor wafers

AUTHOR(S)
Degertekin, F. Levent; Jun Pei; Khuri-Yakub, Butrus T.; Saraswat, Krishna C.
PUB. DATE
March 1994
SOURCE
Applied Physics Letters;3/14/1994, Vol. 64 Issue 11, p1338
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the spatial temperature distribution in semiconductor wafers during rapid thermal processing. Use of acoustic tomography; Application of electronic switching information of the transmitter and receiver transducer; Calculation of the temperature distribution from different pixel map measurements.
ACCESSION #
4289571

 

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